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"A way to implement the electro-optical technique to inertial MEMS."

Kevin Melendez et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.07.041

access: closed

type: Journal Article

metadata version: 2022-03-23

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Kevin Melendez, A. Desmoulin, Kevin Sanchez, Philippe Perdu, Dean Lewis:
A way to implement the electro-optical technique to inertial MEMS. Microelectron. Reliab. 55(9-10): 1916-1919 (2015)

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