"Methodology for Active Junction Profile Extraction in thin film FD-SOI ..."

Tadeu Mota Frutuoso et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830504

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-29

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Tadeu Mota Frutuoso, Xavier Garros, Perrine Batude, Laurent Brunet, Joris Lacord, Benoit Sklénard, V. Lapras, Claire Fenouillet-Béranger, M. Ribotta, A. Magalhaes-Lucas, J. Kanyandekwe, R. Kies, G. Romano, Edoardo Catapano, Mikaël Cassé, Jose Lugo-Alvarez, Philippe Ferrari, Fred Gaillard:
Methodology for Active Junction Profile Extraction in thin film FD-SOI Enabling performance driver identification in 500°C devices for 3D sequential integration. VLSI Technology and Circuits 2022: 332-333

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