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Tetsuaki Matsunawa
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2020 – today
- 2024
- [j3]Masaki Kuramochi, Yukihide Kohira, Hiroyoshi Tanabe, Tetsuaki Matsunawa, Chikaaki Kodama:
Development of a Lithography Simulation Tool Set in Various Optical Conditions for Source Mask Optimization. IEEE Access 12: 58490-58501 (2024)
2010 – 2019
- 2019
- [j2]Yibo Lin, Meng Li, Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, David Z. Pan:
Data Efficient Lithography Modeling With Transfer Learning and Active Data Selection. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 38(10): 1900-1913 (2019) - 2018
- [j1]Xiaoqing Xu, Yibo Lin, Meng Li, Tetsuaki Matsunawa, Shigeki Nojima, Chikaaki Kodama, Toshiya Kotani, David Z. Pan:
Subresolution Assist Feature Generation With Supervised Data Learning. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 37(6): 1225-1236 (2018) - [c6]Yibo Lin, Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, Meng Li, David Z. Pan:
Data Efficient Lithography Modeling with Residual Neural Networks and Transfer Learning. ISPD 2018: 82-89 - [i1]Yibo Lin, Meng Li, Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, David Z. Pan:
Data Efficient Lithography Modeling with Transfer Learning and Active Data Selection. CoRR abs/1807.03257 (2018) - 2017
- [c5]Yoichi Tomioka, Tetsuaki Matsunawa, Chikaaki Kodama, Shigeki Nojima:
Lithography hotspot detection by two-stage cascade classifier using histogram of oriented light propagation. ASP-DAC 2017: 81-86 - 2016
- [c4]Tetsuaki Matsunawa, Bei Yu, David Z. Pan:
Laplacian eigenmaps and bayesian clustering based layout pattern sampling and its applications to hotspot detection and OPC. ASP-DAC 2016: 679-684 - [c3]Xiaoqing Xu, Tetsuaki Matsunawa, Shigeki Nojima, Chikaaki Kodama, Toshiya Kotani, David Z. Pan:
A Machine Learning Based Framework for Sub-Resolution Assist Feature Generation. ISPD 2016: 161-168 - 2015
- [c2]Bei Yu, David Z. Pan, Tetsuaki Matsunawa, Xuan Zeng:
Machine learning and pattern matching in physical design. ASP-DAC 2015: 286-293
2000 – 2009
- 2007
- [c1]Tetsuaki Matsunawa, Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa, Eiichi Takahashi, Tsuneo Terasawa, Toshihiko Tanaka, Osamu Suga, Tetsuya Higuchi:
Adaptive Optical Proximity Correction Using an Optimization Method. CIT 2007: 853-860
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