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"Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode ..."

Alaleh Tajalli et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.06.037

access: open

type: Journal Article

metadata version: 2024-05-07

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Alaleh Tajalli, Eleonora Canato, Arianna Nardo, Matteo Meneghini, Arno Stockman, Peter Moens, Enrico Zanoni, Gaudenzio Meneghesso:
Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors. Microelectron. Reliab. 88-90: 572-576 (2018)

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