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"A Novel Wafer Manipulation Method for Yield Improvement and Cost Reduction ..."

Bei Zhang, Vishwani D. Agrawal (2014)

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DOI: 10.1007/S10836-013-5429-1

access: closed

type: Journal Article

metadata version: 2020-09-11

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Bei Zhang, Vishwani D. Agrawal:
A Novel Wafer Manipulation Method for Yield Improvement and Cost Reduction of 3D Wafer-on-Wafer Stacked ICs. J. Electron. Test. 30(1): 57-75 (2014)

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