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"Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film ..."
Tarek Ali et al. (2022)
- Tarek Ali, Ricardo Olivo, S. Kerdilès, David Lehninger, Maximilian Lederer
, Sourav De, A.-S. Royet, Ayse Sünbül, A. Prabhu, Kati Kühnel, Malte Czernohorsky, M. Rudolph, Raik Hoffmann, Christelle Charpin-Nicolle, Laurent Grenouillet, Thomas Kämpfe
, Konrad Seidel:
Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability. IMW 2022: 1-4
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