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"Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal ..."
Eugenio Dentoni Litta, Per-Erik Hellström, Mikael Östling (2013)
- Eugenio Dentoni Litta
, Per-Erik Hellström, Mikael Östling
:
Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs. ESSDERC 2013: 155-158
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