BibTeX record journals/mr/RothschildMKSEDCRVVVLBDJNAB07

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@article{DBLP:journals/mr/RothschildMKSEDCRVVVLBDJNAB07,
  author       = {A. Rothschild and
                  R. Mitsuhashi and
                  Christoph Kerner and
                  X. Shi and
                  J. L. Everaert and
                  L. Date and
                  Thierry Conard and
                  Olivier Richard and
                  C. Vrancken and
                  R. Verbeeck and
                  Anabela Veloso and
                  A. Lauwers and
                  Muriel de Potter de ten Broeck and
                  I. Debusschere and
                  M. Jurczak and
                  M. Niwa and
                  Philippe Absil and
                  S. Biesemans},
  title        = {Optimization of HfSiON using a design of experiment {(DOE)} approach
                  on 0.45 {V} V\({}_{\mbox{t}}\) Ni-FUSI {CMOS} transistors},
  journal      = {Microelectron. Reliab.},
  volume       = {47},
  number       = {4-5},
  pages        = {521--524},
  year         = {2007},
  url          = {https://doi.org/10.1016/j.microrel.2007.01.042},
  doi          = {10.1016/J.MICROREL.2007.01.042},
  timestamp    = {Wed, 13 Mar 2024 18:04:50 +0100},
  biburl       = {https://dblp.org/rec/journals/mr/RothschildMKSEDCRVVVLBDJNAB07.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}