BibTeX record journals/mr/RothschildMKSEDCRVVVLBDJNAB07

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@article{DBLP:journals/mr/RothschildMKSEDCRVVVLBDJNAB07,
  author    = {A. Rothschild and
               R. Mitsuhashi and
               C. Kerner and
               X. Shi and
               J. L. Everaert and
               L. Date and
               Thierry Conard and
               Olivier Richard and
               C. Vrancken and
               R. Verbeeck and
               Anabela Veloso and
               A. Lauwers and
               M. de Potter de ten Broeck and
               I. Debusschere and
               M. Jurczak and
               M. Niwa and
               Philippe Absil and
               S. Biesemans},
  title     = {Optimization of HfSiON using a design of experiment {(DOE)} approach
               on 0.45 {V} V\({}_{\mbox{t}}\) Ni-FUSI {CMOS} transistors},
  journal   = {Microelectron. Reliab.},
  volume    = {47},
  number    = {4-5},
  pages     = {521--524},
  year      = {2007},
  url       = {https://doi.org/10.1016/j.microrel.2007.01.042},
  doi       = {10.1016/j.microrel.2007.01.042},
  timestamp = {Tue, 07 Jul 2020 17:45:38 +0200},
  biburl    = {https://dblp.org/rec/journals/mr/RothschildMKSEDCRVVVLBDJNAB07.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}