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Bee-San Teo

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Journal Articles

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2007
[j4]
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Kah-Yoong Chan, Bee-San Teo:
Investigation into the influence of direct current (DC) power in the magnetron sputtering process on the copper crystallite size. Microelectron. J. 38(1): 60-62 (2007)
2006
[j3]
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Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo:
Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique. Microelectron. J. 37(7): 608-612 (2006)
[j2]
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Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo:
Effects of substrate temperature on electrical and structural properties of copper thin films. Microelectron. J. 37(9): 930-937 (2006)
[j1]
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Kah-Yoong Chan, Bee-San Teo:
Atomic force microscopy (AFM) and X-ray diffraction (XRD) investigations of copper thin films prepared by dc magnetron sputtering technique. Microelectron. J. 37(10): 1064-1071 (2006)

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