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"Effects of substrate temperature on electrical and structural properties ..."

Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo (2006)

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DOI: 10.1016/J.MEJO.2006.01.011

access: closed

type: Journal Article

metadata version: 2022-10-02

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Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo:
Effects of substrate temperature on electrical and structural properties of copper thin films. Microelectron. J. 37(9): 930-937 (2006)

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