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J. Steigerwald

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2010 – 2019

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2018
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F. Griggio, James Palmer, F. Pan, N. Toledo, Anthony Schmitz, Ilan Tsameret, R. Kasim, Gerald S. Leatherman, Jeffery Hicks, A. Madhavan, J. Shin, J. Steigerwald, A. Yeoh, C. Auth:
Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology. IRPS 2018: 6

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