"Reliability of dual-damascene local interconnects featuring cobalt on 10 ..."

F. Griggio et al. (2018)

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DOI: 10.1109/IRPS.2018.8353641

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-25

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F. Griggio, James Palmer, F. Pan, N. Toledo, Anthony Schmitz, Ilan Tsameret, R. Kasim, Gerald S. Leatherman, Jeffery Hicks, A. Madhavan, J. Shin, J. Steigerwald, A. Yeoh, C. Auth:
Reliability of dual-damascene local interconnects featuring cobalt on 10 nm logic technology. IRPS 2018: 6

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