"A Novel Six Degrees-of-Freedom Parallel Robot for MEMS Fabrication."

Hagay Bamberger, Moshe Shoham (2007)

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DOI: 10.1109/TRO.2006.889493

access: closed

type: Journal Article

metadata version: 2017-05-20

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Hagay Bamberger, Moshe Shoham:
A Novel Six Degrees-of-Freedom Parallel Robot for MEMS Fabrication. IEEE Trans. Robotics 23(2): 189-195 (2007)

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