"An Effective Layout Decomposition Method for DSA with Multiple Patterning ..."

Yunfeng Yang et al. (2017)

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DOI: 10.1145/3131847

access: closed

type: Journal Article

metadata version: 2023-08-16

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Yunfeng Yang, Wai-Shing Luk, Hai Zhou, David Z. Pan, Dian Zhou, Changhao Yan, Xuan Zeng:
An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation. ACM Trans. Design Autom. Electr. Syst. 23(1): 11:1-11:27 (2017)

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