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"A Microvision-Based Motion Measurement System for Nanopositioners Using ..."

Sheng Yao et al. (2023)

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DOI: 10.1109/TIM.2023.3234038

access: closed

type: Journal Article

metadata version: 2023-01-31

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Sheng Yao, Xianmin Zhang, Benliang Zhu, Hai Li, Longhuan Yu, Sergej Fatikow:
A Microvision-Based Motion Measurement System for Nanopositioners Using the Feature-to-Phase Method. IEEE Trans. Instrum. Meas. 72: 1-11 (2023)

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