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"An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning ..."
Joel Bafumba Liseli et al. (2020)
- Joel Bafumba Liseli
, Joël Agnus
, Philippe Lutz
, Micky Rakotondrabe
:
An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation. IEEE Trans. Instrum. Meas. 69(1): 2-14 (2020)

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