"Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image ..."

Hai Li et al. (2019)

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DOI: 10.1109/TIM.2018.2853378

access: closed

type: Journal Article

metadata version: 2020-06-08

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Hai Li, Xianmin Zhang, Benliang Zhu, Sergej Fatikow:
Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation. IEEE Trans. Instrum. Meas. 68(3): 782-790 (2019)

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