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"Modeling and Controller Design of a Precision Hybrid Scanner for ..."

Jim-Wei Wu et al. (2014)

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DOI: 10.1109/TIE.2013.2279352

access: closed

type: Journal Article

metadata version: 2022-10-02

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Jim-Wei Wu, Kuan-Chia Huang, Ming-Li Chiang, Mei-Yung Chen, Li-Chen Fu:
Modeling and Controller Design of a Precision Hybrid Scanner for Application in Large Measurement-Range Atomic Force Microscopy. IEEE Trans. Ind. Electron. 61(7): 3704-3712 (2014)

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