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"Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach."

Steven Ian Moore, S. O. Reza Moheimani (2015)

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DOI: 10.1109/TCST.2014.2363137

access: closed

type: Journal Article

metadata version: 2020-06-15

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Steven Ian Moore, S. O. Reza Moheimani:
Vibration Control With MEMS Electrostatic Drives: A Self-Sensing Approach. IEEE Trans. Control. Syst. Technol. 23(3): 1237-1244 (2015)

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