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"A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, ..."

Mohammad Maroufi, Ali Bazaei, S. O. Reza Moheimani (2015)

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DOI: 10.1109/TCST.2014.2345098

access: closed

type: Journal Article

metadata version: 2020-06-15

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Mohammad Maroufi, Ali Bazaei, S. O. Reza Moheimani:
A High-Bandwidth MEMS Nanopositioner for On-Chip AFM: Design, Characterization, and Control. IEEE Trans. Control. Syst. Technol. 23(2): 504-512 (2015)

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