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"A novel hierarchical approach for proximity effect correction in electron ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Kenji Harafuji et al. (1993)

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DOI: 10.1109/43.256925

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - https://dblp.org/rec/journals/tcad/HarafujiMNKY93
Kenji Harafuji, Akio Misaka, Noboru Nomura, Masahiro Kawamoto, Hirohiko Yamashita:
A novel hierarchical approach for proximity effect correction in electron beam lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12(10): 1508-1514 (1993)

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