"Detailed Placement for Enhanced Control of Resist and Etch CDs."

Puneet Gupta, Andrew B. Kahng, Chul-Hong Park (2007)

> Home

Details and statistics

DOI: 10.1109/TCAD.2007.906998

access: closed

type: Journal Article

metadata version: 2021-10-28

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tcad/GuptaKP07
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tcad/GuptaKP07
Puneet Gupta, Andrew B. Kahng, Chul-Hong Park:
Detailed Placement for Enhanced Control of Resist and Etch CDs. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 26(12): 2144-2157 (2007)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.