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"ELIAD: Efficient Lithography Aware Detailed Routing Algorithm With Compact ..."

Minsik Cho et al. (2009)

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DOI: 10.1109/TCAD.2009.2018876

access: closed

type: Journal Article

metadata version: 2020-09-24

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Minsik Cho, Kun Yuan, Yongchan Ban, David Z. Pan:
ELIAD: Efficient Lithography Aware Detailed Routing Algorithm With Compact and Macro Post-OPC Printability Prediction. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 28(7): 1006-1016 (2009)

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