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"Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift ..."

Young-Seok Lee et al. (2022)

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DOI: 10.3390/S22166029

access: open

type: Journal Article

metadata version: 2022-12-05

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  dblp key:
  - journals/sensors/LeeKLCSY22
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  - https://dblp.org/rec/journals/sensors/LeeKLCSY22
Young-Seok Lee, Si-Jun Kim, Jang-Jae Lee, Chul-Hee Cho, In-Ho Seong, Shin-Jae You:
Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO2. Sensors 22(16): 6029 (2022)

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