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2020 – today
- 2022
[j6]Si-Jun Kim
, Jang-Jae Lee, Young-Seok Lee, Chul-Hee Cho, Shin-Jae You:
Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe. Sensors 22(3): 1291 (2022)- [j5]Si-Jun Kim, Sang-Ho Lee, Ye-Bin You, Young-Seok Lee, In-Ho Seong, Chul-Hee Cho, Jang-Jae Lee, Shin-Jae You:
Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics. Sensors 22(15): 5487 (2022) - [j4]Si-Jun Kim, In-Ho Seong, Young-Seok Lee, Chul-Hee Cho, Won-nyoung Jeong, Ye-bin You, Jang-Jae Lee, Shin-Jae You:
Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation. Sensors 22(15): 5871 (2022) - [j3]Young-Seok Lee, Si-Jun Kim, Jang-Jae Lee, Chul-Hee Cho, In-Ho Seong, Shin-Jae You:
Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO2. Sensors 22(16): 6029 (2022) - [j2]In-Ho Seong, Si-Jun Kim, Young-Seok Lee, Chul-Hee Cho, Jang-Jae Lee, Won-nyoung Jeong, Ye-Bin You, Shin-Jae You:
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath. Sensors 22(16): 6254 (2022) - [j1]Chul-Hee Cho, Si-Jun Kim, Young-Seok Lee, Won-nyoung Jeong, In-Ho Seong, Jang-Jae Lee, Minsu Choi, Ye-Bin You, Sang-Ho Lee, Jinho Lee, Shin-Jae You:
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma. Sensors 22(17): 6589 (2022)
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