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"Measurements of True Leak Rates of MEMS Packages."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Bongtae Han (2012)

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DOI: 10.3390/S120303082

access: open

type: Journal Article

metadata version: 2018-11-30

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Bongtae Han:
Measurements of True Leak Rates of MEMS Packages. Sensors 12(3): 3082-3104 (2012)

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last updated on 2018-11-30 13:28 CET by the dblp team

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