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"A case study on modeling and optimizing photolithography stage of ..."

Hyun-Jin Kim, Kwang-Jae Kim, Doh-Soon Kwak (2010)

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DOI: 10.1002/QRE.1149

access: closed

type: Journal Article

metadata version: 2020-07-09

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Hyun-Jin Kim, Kwang-Jae Kim, Doh-Soon Kwak:
A case study on modeling and optimizing photolithography stage of semiconductor fabrication process. Qual. Reliab. Eng. Int. 26(7): 765-774 (2010)

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