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"On the reliability of electrostatic NEMS/MEMS devices: Review of present ..."

Usama Zaghloul et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.07.081

access: closed

type: Journal Article

metadata version: 2022-10-02

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Usama Zaghloul, George J. Papaioannou, Bharat Bhushan, Fabio Coccetti, Patrick Pons, Robert Plana:
On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies. Microelectron. Reliab. 51(9-11): 1810-1818 (2011)

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