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"Temperature stability of electro-thermally and piezoelectrically actuated ..."

G. S. Wood et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.05.011

access: closed

type: Journal Article

metadata version: 2020-02-22

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G. S. Wood, I. Gual, P. Parmiter, Rebecca Cheung:
Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators. Microelectron. Reliab. 50(12): 1977-1983 (2010)

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