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"Minimizing hydrogen content in silicon oxynitride by thermal oxidation of ..."
C. K. Wong et al. (2006)
- C. K. Wong, Hei Wong
, Mansun Chan
, Chi-Wah Kok, H. P. Chan
:
Minimizing hydrogen content in silicon oxynitride by thermal oxidation of silicon-rich silicon nitride. Microelectron. Reliab. 46(12): 2056-2061 (2006)
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