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"Silicon oxynitride integrated waveguide for on-chip optical interconnects ..."
C. K. Wong et al. (2008)
- C. K. Wong, Hei Wong
, Mansun Chan
, Y. T. Chow, H. P. Chan
:
Silicon oxynitride integrated waveguide for on-chip optical interconnects applications. Microelectron. Reliab. 48(2): 212-218 (2008)
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