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"Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact ..."

Ying Wang et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.08.003

access: closed

type: Journal Article

metadata version: 2021-01-21

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Ying Wang, Fei Cao, Minghui Ding, Yun-Tao Liu:
Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system. Microelectron. Reliab. 48(11-12): 1800-1803 (2008)

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