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"Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) ..."

Ivo Vogt et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.06.080

access: closed

type: Journal Article

metadata version: 2021-10-14

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Ivo Vogt, Tomonori Nakamura, Ingrid De Wolf, Christian Boit:
Detection of failure mechanisms in 24-40 nm FinFETs with (spectral) photon emission techniques using InGaAs camera. Microelectron. Reliab. 88-90: 334-338 (2018)

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