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"Reliability study of TaON capacitors: From leakage current ..."

M. Verchiani et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.07.032

access: closed

type: Journal Article

metadata version: 2023-03-21

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M. Verchiani, Emilien Bouyssou, Guillaume Fiannaca, F. Cantin, Christine Anceau, Pierre Ranson:
Reliability study of TaON capacitors: From leakage current characterization to ESD robustness prediction. Microelectron. Reliab. 48(8-9): 1412-1416 (2008)

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