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"High-resolution X-ray computed tomography of through silicon vias for RF ..."

P. J. de Veen et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.06.065

access: closed

type: Journal Article

metadata version: 2020-02-22

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P. J. de Veen, C. Bos, D. R. Hoogstede, C. Th. A. Revenberg, Jessica Liljeholm, Thorbjorn Ebefors:
High-resolution X-ray computed tomography of through silicon vias for RF MEMS integrated passive device applications. Microelectron. Reliab. 55(9-10): 1644-1648 (2015)

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