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"Effects of aluminum incorporation on hafnium oxide film using plasma ..."
Banani Sen et al. (2008)
- Banani Sen, Bing-Liang Yang, Hei Wong
, Chi-Wah Kok, P. K. Chu, A. Huang:
Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation. Microelectron. Reliab. 48(11-12): 1765-1768 (2008)
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