"Impact of design factors and environment on the ESD sensitivity of MEMS ..."

Sandeep Sangameswaran et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.079

access: closed

type: Journal Article

metadata version: 2020-02-22

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Sandeep Sangameswaran, Jeroen De Coster, Guido Groeseneken, Ingrid De Wolf:
Impact of design factors and environment on the ESD sensitivity of MEMS micromirrors. Microelectron. Reliab. 50(9-11): 1383-1387 (2010)

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