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"Design and development of MEMS-based structures for in-situ ..."

F. Saghaeian et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.07.005

access: closed

type: Journal Article

metadata version: 2020-02-22

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F. Saghaeian, J. Keckes, K. A. Schreiber, T. Mittereder:
Design and development of MEMS-based structures for in-situ characterization of thermo-mechanical behaviour of thin metal films. Microelectron. Reliab. 88-90: 829-834 (2018)

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