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"Morphological and electrical comparison of Ti and Ta based ohmic contacts ..."

Alexander Pooth et al. (2017)

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DOI: 10.1016/J.MICROREL.2016.11.002

access: closed

type: Journal Article

metadata version: 2020-10-26

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  - https://dblp.org/rec/journals/mr/PoothBRHPTMWCUK17
Alexander Pooth, Johan Bergsten, Niklas Rorsman, Hassan Hirshy, R. Perks, Paul J. Tasker, Trevor Martin, Richard F. Webster, Dave Cherns, Michael J. Uren, Martin Kuball:
Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs. Microelectron. Reliab. 68: 2-4 (2017)

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