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"Application of polyimide to bending-mode microactuators with Ni/Fe and ..."

C. T. Pan et al. (2006)

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DOI: 10.1016/J.MICROREL.2005.10.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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C. T. Pan, P. J. Cheng, C. K. Yen, C. C. Hsieh:
Application of polyimide to bending-mode microactuators with Ni/Fe and Fe/Pt magnet. Microelectron. Reliab. 46(8): 1369-1381 (2006)

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