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"Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL ..."

Sebastian Orellana et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.06.032

access: closed

type: Journal Article

metadata version: 2023-01-25

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Sebastian Orellana, Brice Arrazat, Pascal Fornara, Christian Rivero, Sylvain Blayac, Pierre Montmitonnet, Karim Inal:
Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect. Microelectron. Reliab. 55(9-10): 1896-1900 (2015)

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