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"Reliability and failure in single crystal silicon MEMS devices."

Antonia Neels et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.07.018

access: closed

type: Journal Article

metadata version: 2020-11-04

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Antonia Neels, A. Dommann, A. Schifferle, O. Papes, Edoardo Mazza:
Reliability and failure in single crystal silicon MEMS devices. Microelectron. Reliab. 48(8-9): 1245-1247 (2008)

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