"Microscale temperature sensing using novel reliable silicon vertical ..."

M. A. Matin et al. (2015)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2015.09.003

access: closed

type: Journal Article

metadata version: 2022-10-02

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/MatinIKSI15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/MatinIKSI15
M. A. Matin, A. Ikedo, Takeshi Kawano, K. Sawada, Makoto Ishida:
Microscale temperature sensing using novel reliable silicon vertical microprobe array: Computation and experiment. Microelectron. Reliab. 55(12): 2689-2697 (2015)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.