"Integrated SMD pressure/flow/temperature multisensor for compressed air in ..."

Thomas Maeder et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.03.021

access: closed

type: Journal Article

metadata version: 2020-02-22

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Thomas Maeder, Yannick Fournier, Jean-Bastien Coma, Nicolas Craquelin, Peter Ryser:
Integrated SMD pressure/flow/temperature multisensor for compressed air in LTCC technology: Thermal flow and temperature sensing. Microelectron. Reliab. 51(7): 1245-1249 (2011)

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