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"Non-ideal effects improvement of SF6 plasma treated hafnium ..."
Tseng-Fu Lu et al. (2010)
- Tseng-Fu Lu, Jer-Chyi Wang
, Chia-Ming Yang
, Chung-Po Chang, Kuan-I Ho, Chi-Fong Ai, Chao-Sung Lai
:
Non-ideal effects improvement of SF6 plasma treated hafnium oxide film based on electrolyte-insulator-semiconductor structure for pH-sensor application. Microelectron. Reliab. 50(5): 742-746 (2010)
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