"Improved surface morphology of a Ti/Al/Ni/Au ohmic contact for AlGaN/GaN ..."

Jin Hong Lim, Jeong Jin Kim, Jeon-Wook Yang (2015)

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DOI: 10.1016/J.MICROREL.2015.10.005

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jin Hong Lim, Jeong Jin Kim, Jeon-Wook Yang:
Improved surface morphology of a Ti/Al/Ni/Au ohmic contact for AlGaN/GaN heterostructure by Al₂O₃ particles. Microelectron. Reliab. 55(12): 2565-2568 (2015)

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