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"Modeling of dielectric charging in electrostatic MEMS switches."

A. Koszewski et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.104

access: closed

type: Journal Article

metadata version: 2024-03-01

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A. Koszewski, F. Souchon, Ch. Dieppedale, Thierry Ouisse:
Modeling of dielectric charging in electrostatic MEMS switches. Microelectron. Reliab. 50(9-11): 1609-1614 (2010)

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