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"Novel charge neutralization techniques applicable to wide current range of ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Hirotaka Komoda et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.01.014

access: closed

type: Journal Article

metadata version: 2020-02-22

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  dblp key:
  - journals/mr/KomodaYYINWY06
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  persistent URL:
  - https://dblp.org/rec/journals/mr/KomodaYYINWY06
Hirotaka Komoda, Masaaki Yoshida, Yoh Yamamoto, Kouji Iwasaki, Ikuko Nakatani, Heiji Watanabe, Kiyoshi Yasutake:
Novel charge neutralization techniques applicable to wide current range of FIB processing in FIB-SEM combined system. Microelectron. Reliab. 46(12): 2085-2095 (2006)

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last updated on 2020-02-22 19:28 CET by the dblp team

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