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"Unusual defects, generated by wafer sawing: Diagnosis, mechanisms and how ..."

Peter Jacob, Werner Rothkirch (2008)

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DOI: 10.1016/J.MICROREL.2008.06.040

access: closed

type: Journal Article

metadata version: 2020-02-22

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Peter Jacob, Werner Rothkirch:
Unusual defects, generated by wafer sawing: Diagnosis, mechanisms and how to distinguish from related failures. Microelectron. Reliab. 48(8-9): 1253-1257 (2008)

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